Chemically Stable Atomic-Layer-Deposited Al2O3 Films for Processability
نویسندگان
چکیده
منابع مشابه
Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
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ژورنال
عنوان ژورنال: ACS Omega
سال: 2017
ISSN: 2470-1343,2470-1343
DOI: 10.1021/acsomega.7b00443